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    High Density Plasma Sources: Design, Physics and Performance
    Unavailable
    High Density Plasma Sources: Design, Physics and Performance
    Unavailable
    High Density Plasma Sources: Design, Physics and Performance
    Ebook685 pages6 hours

    High Density Plasma Sources: Design, Physics and Performance

    By Oleg A. Popov

    ()

    Currently unavailable

    Currently unavailable

    About this ebook

    This book describes the design, physics, and performance of high density plasma sources which have been extensively explored in low pressure plasma processing, such as plasma etching and planarization, plasma enhanced chemical vapor deposition of thin films, sputtered deposition of metals and dielectrics, epitaxial growth of silicon and GaAs, and many other applications.

    This is a comprehensive survey and a detailed description of most advanced high density plasma sources used in plasma processing. The book is a balanced presentation in that it gives both a theoretical treatment and practical applications. It should be of considerable interest to scientists and engineers working on plasma source design, and process development.
    LanguageEnglish
    PublisherElsevier Science
    Release dateDec 31, 1996
    ISBN9780815517894
    Unavailable
    High Density Plasma Sources: Design, Physics and Performance

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