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    Plasma Etching: An Introduction
    Unavailable
    Plasma Etching: An Introduction
    Unavailable
    Plasma Etching: An Introduction
    Ebook789 pages7 hours

    Plasma Etching: An Introduction

    By Academic Press

    ()

    Currently unavailable

    Currently unavailable

    About this ebook

    Plasma etching plays an essential role in microelectronic circuit manufacturing. Suitable for researchers, process engineers, and graduate students, this book introduces the basic physics and chemistry of electrical discharges and relates them to plasma etching mechanisms. Throughout the volume the authors offer practical examples of process chemistry, equipment design, and production methods.
    LanguageEnglish
    PublisherAcademic Press
    Release dateSep 8, 1989
    ISBN9780080924465
    Unavailable
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