Ebook271 pages10 hours
Semiconductor Materials Analysis and Fabrication Process Control
Rating: 0 out of 5 stars
()
About this ebook
There is a growing awareness that the successful implementation of novel material systems and technology steps in the fabrication of microelectronic and optoelectronic devices, is critically dependent on the understanding and control of the materials, the process steps and their interactions. The contributions in this volume demonstrate that characterisation and analysis techniques are an essential support mechanism for research in these fields. Current major research themes are reviewed both in the development and application of diagnostic techniques for advanced materials analysis and fabrication process control. Two distinct trends are elucidated: the emergence and evaluation of sophisticated in situ optical diagnostic techniques such as photoreflectance and spectroellipsometry and the industrial application of ultra-high sensitivity chemical analysis techniques for contamination monitoring. The volume will serve as a useful and timely overview of this increasingly important field.
Related to Semiconductor Materials Analysis and Fabrication Process Control
Titles in the series (33)
Deep Implants: Fundamentals and Applications Rating: 0 out of 5 stars0 ratingsHigh T<INF>c</INF> Superconductors: Preparation and Application Rating: 0 out of 5 stars0 ratingsMetastable Alloys: Preparation and Properties Rating: 0 out of 5 stars0 ratingsCeramic Materials Research Rating: 4 out of 5 stars4/5Photon, Beam and Plasma Assisted Processing: Fundamentals and Device Technology Rating: 0 out of 5 stars0 ratingsRare-Earth Permanent Magnets Rating: 0 out of 5 stars0 ratingsSolid State Ionics Rating: 0 out of 5 stars0 ratingsMetallurgical Coatings and Materials Surface Modifications Rating: 0 out of 5 stars0 ratingsSuperconducting and Low-Temperature Particle Detectors Rating: 0 out of 5 stars0 ratingsScience and Technology of Defects in Silicon Rating: 0 out of 5 stars0 ratingsSilicon Molecular Beam Epitaxy Rating: 0 out of 5 stars0 ratingsBeam Processing and Laser Chemistry Rating: 0 out of 5 stars0 ratingsAcoustic, Thermal Wave and Optical Characterization of Materials Rating: 0 out of 5 stars0 ratingsHigh T<INF>c</INF> Superconductor Materials Rating: 0 out of 5 stars0 ratingsInterfaces in Biomaterials Sciences Rating: 0 out of 5 stars0 ratingsMagnetic Thin Films, Multilayers and Superlattices Rating: 0 out of 5 stars0 ratingsMetal Matrix Composites Rating: 0 out of 5 stars0 ratingsSiC, Natural and Synthetic Diamond and Related Materials Rating: 0 out of 5 stars0 ratingsNuclear Methods in Semiconductor Physics Rating: 0 out of 5 stars0 ratingsSurface Processing and Laser Assisted Chemistry Rating: 0 out of 5 stars0 ratingsPolyconjugated Materials Rating: 0 out of 5 stars0 ratingsSemiconductor Materials Analysis and Fabrication Process Control Rating: 0 out of 5 stars0 ratingsClays and Hydrosilicate Gels in Nuclear Fields Rating: 0 out of 5 stars0 ratingsAnalytical Techniques for the Characterization of Compound Semiconductors Rating: 3 out of 5 stars3/5High Energy and High Dose Ion Implantation Rating: 0 out of 5 stars0 ratingsSiGe Based Technologies Rating: 0 out of 5 stars0 ratingsModifications Induced by Irradiation in Glasses Rating: 0 out of 5 stars0 ratingsChemistry for Electronic Materials Rating: 0 out of 5 stars0 ratingsNuclear Materials for Fission Reactors Rating: 0 out of 5 stars0 ratingsLaser Surface Processing and Characterization Rating: 0 out of 5 stars0 ratings
Related ebooks
Materials and Processes for Next Generation Lithography Rating: 0 out of 5 stars0 ratingsMicrobolometers: Fundamentals, Materials, and Recent Developments Rating: 1 out of 5 stars1/5Silicon Processing for Photovoltaics II Rating: 0 out of 5 stars0 ratingsSolid State Ionics Rating: 0 out of 5 stars0 ratingsChemistry for Electronic Materials Rating: 0 out of 5 stars0 ratingsHandbook of Chemical Vapor Deposition: Principles, Technology and Applications Rating: 0 out of 5 stars0 ratingsPlasma Etching Processes for CMOS Devices Realization Rating: 0 out of 5 stars0 ratingsIntel Xeon Phi Processor High Performance Programming: Knights Landing Edition Rating: 0 out of 5 stars0 ratingsMetal – Semiconductor Contacts and Devices Rating: 0 out of 5 stars0 ratingsCharacterization of Integrated Circuit Packaging Materials Rating: 0 out of 5 stars0 ratingsPlasma Processing for VLSI Rating: 5 out of 5 stars5/5Computational Materials Science: Surfaces, Interfaces, Crystallization Rating: 0 out of 5 stars0 ratingsHandbook of Nanofabrication Rating: 0 out of 5 stars0 ratingsMolecular Beam Epitaxy Rating: 0 out of 5 stars0 ratingsCompound Semiconductor Device Physics Rating: 0 out of 5 stars0 ratingsModern Raman Spectroscopy: A Practical Approach Rating: 0 out of 5 stars0 ratingsNanocharacterization Techniques Rating: 0 out of 5 stars0 ratingsReliability of Semiconductor Lasers and Optoelectronic Devices Rating: 0 out of 5 stars0 ratingsHot Carriers in Semiconductor Nanostructures: Physics and Applications Rating: 0 out of 5 stars0 ratingsMachine Learning in Bio-Signal Analysis and Diagnostic Imaging Rating: 0 out of 5 stars0 ratingsBonds and Bands in Semiconductors Rating: 0 out of 5 stars0 ratingsMicro-nanoelectronics Devices: Modeling of Diffusion and Operation Processes Rating: 0 out of 5 stars0 ratingsSilicon Integrated Circuits Rating: 4 out of 5 stars4/5Applied Photonics Rating: 0 out of 5 stars0 ratingsSurfaces and Interfaces: Physics and Electronics Rating: 0 out of 5 stars0 ratingsModern Mathematics for the Engineer: Second Series Rating: 0 out of 5 stars0 ratingsHandbook of Thin Film Deposition Rating: 0 out of 5 stars0 ratingsHandbook of VLSI Microlithography: Principles, Technology and Applications Rating: 5 out of 5 stars5/5Computational Materials Engineering: Achieving High Accuracy and Efficiency in Metals Processing Simulations Rating: 0 out of 5 stars0 ratingsNano Optoelectronic Sensors and Devices: Nanophotonics from Design to Manufacturing Rating: 0 out of 5 stars0 ratings
Physics For You
Midnight in Chernobyl: The Untold Story of the World's Greatest Nuclear Disaster Rating: 4 out of 5 stars4/5The God Effect: Quantum Entanglement, Science's Strangest Phenomenon Rating: 4 out of 5 stars4/5How to Diagnose and Fix Everything Electronic, Second Edition Rating: 4 out of 5 stars4/5What If?: Serious Scientific Answers to Absurd Hypothetical Questions Rating: 5 out of 5 stars5/5The Dancing Wu Li Masters: An Overview of the New Physics Rating: 4 out of 5 stars4/5Quantum Physics for Beginners Rating: 4 out of 5 stars4/5Step By Step Mixing: How to Create Great Mixes Using Only 5 Plug-ins Rating: 5 out of 5 stars5/5Welcome to the Universe: An Astrophysical Tour Rating: 4 out of 5 stars4/5The Invisible Rainbow: A History of Electricity and Life Rating: 4 out of 5 stars4/5Quantum Physics: A Beginners Guide to How Quantum Physics Affects Everything around Us Rating: 5 out of 5 stars5/5Moving Through Parallel Worlds To Achieve Your Dreams Rating: 4 out of 5 stars4/5How to Teach Quantum Physics to Your Dog Rating: 4 out of 5 stars4/5The Reality Revolution: The Mind-Blowing Movement to Hack Your Reality Rating: 4 out of 5 stars4/5The Physics of Wall Street: A Brief History of Predicting the Unpredictable Rating: 4 out of 5 stars4/5The End of Everything: (Astrophysically Speaking) Rating: 4 out of 5 stars4/5What the Bleep Do We Know!?™: Discovering the Endless Possibilities for Altering Your Everyday Reality Rating: 5 out of 5 stars5/5The First War of Physics Rating: 4 out of 5 stars4/5Unlocking Spanish with Paul Noble Rating: 5 out of 5 stars5/5Physics Essentials For Dummies Rating: 4 out of 5 stars4/5QED: The Strange Theory of Light and Matter Rating: 4 out of 5 stars4/5Feynman Lectures Simplified 1A: Basics of Physics & Newton's Laws Rating: 5 out of 5 stars5/5Time Travel in Einstein's Universe: The Physical Possibilities of Travel Through Time Rating: 4 out of 5 stars4/5Flatland Rating: 4 out of 5 stars4/5The Science of God: The Convergence of Scientific and Biblical Wisdom Rating: 3 out of 5 stars3/5Vibration and Frequency: How to Get What You Want in Life Rating: 4 out of 5 stars4/5A Universe from Nothing: Why There Is Something Rather than Nothing Rating: 4 out of 5 stars4/5The Theory of Relativity: And Other Essays Rating: 4 out of 5 stars4/5
Reviews for Semiconductor Materials Analysis and Fabrication Process Control
Rating: 0 out of 5 stars
0 ratings
0 ratings0 reviews
Book preview
Semiconductor Materials Analysis and Fabrication Process Control - Elsevier Science
Enjoying the preview?
Page 1 of 1