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Deep Implants: Fundamentals and Applications
Deep Implants: Fundamentals and Applications
Deep Implants: Fundamentals and Applications
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Deep Implants: Fundamentals and Applications

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Deep implants are produced by the high-energy implantation of impurities in a host material. The thus created subsurface layers have properties that are different from the very surface and the bulk and show great promise for application in the electronics industry.

LanguageEnglish
Release dateJan 1, 1989
ISBN9780444596376
Deep Implants: Fundamentals and Applications

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    Deep Implants - Elsevier Science

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