MEMS TECHNOLOGY

Abdulla fathy Mohamed

Abstract We are grateful in a revolution of microelectronics,
which has dramatically reduced the cost and increased the
capability of electronics. This has given much potential to
prosper in the area of micro mechanics encompassing MEMS
(Micro Electro Mechanical Systems).
IndexTermsTechnology,Febrication,Packeging, Application in
various field,future scope,revolution

can be improved significantly compared to their integrated counter

parts if they are made using MEMS.
B. Gyroscopes:
Micro gyroscopes are newer in the market
compared to micro accelerometers. Some devices have
appeared on the market for navigation application. The key point in
these devices is sensitivity.
C. Accelerometers:

I. INTRODUCTION
Micro electromechanical systems (MEMS) is a technology of
miniaturization that has been largely adopted from the
integrated circuit (IC) industry and applied to the
miniaturization of all systems not only electrical systems but
also mechanical, optical, fluid, magnetic, etc.
II. MEMS DESIGN PROCESS
There are three basic building blocks in MEMS technology,
which are,Deposition Process-the ability to deposit thin films
of material on a substrate, Lithography- to apply a patterned
mask on top of the films by photolithograpic imaging.
Etching-to etch the films selectively to the mask. A MEMS
process is usually a structured sequence of these operations
to form actual devices.

D. Inertial sensors:
Inertial sensors are mechanics sensors aiming at measuring
accelerations, in the mechanics science definition. There are two
categories of inertial sensors.
Automotive

Electronics

Medical

Internal
navigation
system

Mass data
storage
system

Blood
pressure
sensors

Break force
sensor

Projection
screen
television
Earthquake
sensors

Implanted
pressure
sensors
Prosthetic

Fuel level
sensors
Airbag
sensors

Communica
tion
Projection
display in
portable
devices
Splitter and
couplers

Defence

Voltage
control
oscillators
Tunable
lasers

Embedded
systems

Avionics
miniature
pressure
analytical
sensors
instrument
Intelligent
Disk drive
pacemakers Fiber-optics
tyres
head
network
Table I. Application of MEMS in various fields
REFERENCES
III.APPLICATIONS OF MEMS
A. Communications:
High frequency circuits will benefit considerably from
advent of the RF-MEMS technology. Electrical components

[1] Digital Object Identifier: 10.1109/CDC.1998.761988

Publication Year: 1998 , Page(s): 4334- 4335
[2] MEMS: technology, design, CAD and applications
[3] Berkeley Sensor and Actuator Center,
http://bsac.eecs.berkeley.

missile
guidance

Arming
systems

Data
storage
Aircraft
control

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