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Double Corner Cube Method for Enhancing the Sensitivity of Straightness Measurement
Tung-Shiuan Pan1, Ju-Yi Lee1*, Szu-Wei Wu1, Hung-Lin Hsieh2, Cheng-Chih Hsu3
1
1. INTRODUCTION
2. MEASUREMENT PRINCIPLES
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1
0.8
Ours
0.6
Fen's
0.4
0.2
fx 0
-0.2
-0.4
B
(x0, y0)
x
(0,0)
C
Feng's
-0.6
-0.8
-1
0.2 0.4
0.6 0.8
x displacement (mm)
Fig. 4 Relationship between the displacement x and fx.
3. EXPERIMENTAL SETUP
The experiments demonstrating the capability of
the architecture design described above are now
discussed. As shown in Fig. 5, in the experiments with
one corner cube, the laser beam propagating from the
laser to corner cube #1 is 25.4 mm diameter. It is then
reflected back through the beam splitter to the detector.
The beam splitter, which can be replaced with a mirror,
solves the problem of the detector being so large in size
that it may block the propagation of the beam from the
laser. This problem also can be solved by enlarging the
size of corner cube #1.
The two corner cube experiment is shown in Fig 6.
The design is similar to the framework of the one corner
cube experiment but with one more corner cube #2
which has a diameter of 10mm being fixed near the laser.
The beam is again reflected back to corner cube #1 to
again enhance the beam spot displacement on the
detector.
The entire apparatus, except for corner cube #1, is still
fixed on the motorized stage so it can move in a direction
orthogonal to the incident beam from the laser. With the
motion of corner cube #1, there will be a corresponding
displacement of the light spot received by the detector.
The long range motion experiment is designed to
change the direction of the stage to parallel to the
direction of the laser beam. The distance of the travel
path is 300 mm.
In many studies of straightness measurement it is
claimed that interference from the offset of the corner
cubes angle can be ignored. To check on this inference
related to angle offset, we design an experiment for
rotational motion as shown in Fig 7. In the experimental
design the moving stage is replaced, as shown in the
architecture in Fig 6, with a rotational stage to let corner
cube #1 rotate.
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RESULTS
To show the utility of enhancing the displacement
of the light spot on the detector by the additional corner
cube, we respectively measured the results of the two
systems.
The voltage signals from the detector with the step
motion of corner cube #1 are shown in Fig. 8. The
distance of one step is 10 m. We can see that the signals
with two corner cubes are always larger than the signals
with one corner cube. This can indicate that the
displacement of the light spot on the detector is enlarged,
so the signal the detector receives will be
correspondingly enhanced.
The distance of the step is the same in the two
systems, but with the enhancement of the voltage signal,
the sensitivity will be enlarged. From the results in Fig 8
we see that the variation of the voltage signal per each
volt signal(V)
4. DISCUSSION OF EXPERIMENTAL
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[3].
[4].
one corner cube
two corner cubes
[5].
[7].
[8].
[9].
[10].
Fig. 11 Straightness error when corner cube #1 has
rotation motion.
5. CONCLUSION
[11].
REFERENCES
[1]. M. Holmes, R. Hocken, and D. Trumper, The
long-range scanning stage: a novel platform for
scanned-probe microscopy, Precis. Eng. 24,
191209, 2000.
[2]. B. E. Maile, W. Henschel, H. Kurz, B. Rienks, R.
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