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PHYS 570
Instructor : Carlo Segre
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Presented by
Karan Sahni
A20345017
ABSTRACT
Cubic BN (cBN) thin film prepared by Mass ion beam deposition technique
(hBN). Cubic phase content of the thin films is dependent on the roughness of
their substrates and smooth substrate surface is helpful for the nucleation of
cBN phase.
cBN phase is mostly grown in the near surface region of the films and there is
INTRODUCTION
Cubic boron nitride has a structure similar to diamond and is also a super hard
band gap among all III-V compound semiconductor and it can be doped for both
n and p type conductivity, which is still a challenge for diamond.
hBN has a structure very similar to graphite and is a sp2 bonded phase
(aBN) phase and turbostratic BN(tBN) phases can be formed by the cBN films
synthesized by the techniques such as sputtering, laser ablation and PECVD.
Synchrotron radiation X-ray has lots of advantages such as high flux, high
EXPERMENTAL
cBN films were grown on four pieces of p-type Si(001) substrates by MSID
method. To study the effects of the cBN thin film on the roughness of the
substrate ,four substrate with different surface roughness are chosen:
a)
b)
The deposition was carried out at a pressure of 10-8 mbar by alternately deposit
11B+
and
14N+
The GI-XRD data were analyzed by the program JADE 5, and XRR data was
The intensity of hBN (002) peak increase, while the intensity of the cBN
peak decrease, with the roughness of the substrate get larger.
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X-Ray Reflectivity
The profile of the reflected X-ray curve is determined
by three factors:
a) A higher the electron density makes the total angle
bigger
b) A smoother surface makes the slope of the curve
smaller,
c) The thicker film makes the fringes closer if both the
surface and interface are smoother enough.
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SEM Images
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CONCLUSION
BN films were grown on four Si(001) substrate in which one is
unprocessed and other three are polished by diamond powder with
different sizes to obtain different substrate surface roughness. The
cBN phase content of the films depends on the roughness of their
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