Professional Documents
Culture Documents
CLEAN ROOM
MATERIALS OF CONSTRUCTION
REVISION RECORD
REV
ECO
DESCRIPTION
SUBMITTED
APP
WTP10369
Production Release
2/25/99
R. Reinisch
WTP10531
9/06/00
R. Reinisch
ECR0043132
05/06/05
P. Newby
ECR0051974
10/20/05
P. Newby
ECR0056629
03/21/06
P. Newby
ECR0061723
06/28/06
P. Newby
ECR0066500
09/08/06
P. Newby
ECR0089093
Added value for Other Compounds, Total Outgassing to Table 2; updates to Section 13.1 Flammability Acceptance Criteria; fixed page number/section
number references; updated Appendix A: Construction Material Review to include Flammability Acceptance Criteria.
01/18/08
P. Newby
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Table of Contents
1
2
3
4
5
6
7
8
9
10
11
12
13
14
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PURPOSE .........................................................................................................3
SCOPE ..............................................................................................................3
ASSOCIATED DOCUMENTS ...........................................................................4
CLEANROOM CONSTRUCTION EXEMPT MATERIALS ................................5
SEAGATE APPROVED CONSTRUCTION MATERIALS .................................8
CONSTRUCTION MATERIAL REVIEW ...........................................................8
MATERIALS SUBMISSION PROCEDURE.......................................................9
FTIR ANALYSIS ..............................................................................................12
IONIC CONTAMINATION ...............................................................................12
DYNAMIC HEADSPACE OUTGASSING (DHS).............................................13
CORROSION ..................................................................................................15
ESD PROPERTIES .........................................................................................16
FIRE PROTECTION........................................................................................17
APPENDIX A ...................................................................................................18
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1 PURPOSE
This specification establishes the test methods and acceptance criteria to determine the cleanliness
level of materials used in clean room construction and renovation. Materials used for installing
equipment, structural repairs or modifications of walls, floors and ceilings (like temporary polyethylene
sheeting, or signs), must meet the acceptance criteria of this specification. Refer to Specification, Tapes
/ Labels, Cleanroom: 30825-001 for labels.
2 SCOPE
To provide Seagate-wide methods for determining the cleanliness, outgassing, electrical, flammability,
corrosion resistance and cleanability properties of materials, such as paint coatings, ceiling tiles, floor
tiles, sealants, caulk, mastics, foams, gaskets, ducting, greases, lubricants, and metal surfaces for
Seagate clean rooms; also applicable for plastics not in direct contact with disc drives or drive
components. All adhesives used in the fabrication of assemblies used in construction of the cleanroom,
for example in HEPA/ULPA equipment, must be in compliance to Seagate Specification 64902255 and
must be evaluated for fitness of use at relevant conditions of temperature and humidity. All adhesives
cured in the clean room must be individually approved in their specific application.
Material Test Data Expiration
The test data on the following materials expires from the last date tested:
Material
4 years
8 years
NOTE: This specification does not cover performance testing of clean room equipment, like HEPA
filters or Filter Fan Units. A complete assembly of the clean room equipment must be delivered
to the Project Manager for performance testing.
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3 ASSOCIATED DOCUMENTS
64902255
81453598
20800014-001
20800012-001
20800020-001
20800021-001
20800032-001
30228-001
35367-001
ST1027
EHS SOP 109
ANSI ESD-S7.1
ASTM E-84-07
ASTM E-648-06a
ASTM E-662-06
ASTM 1193
FM4910
NFPA 253
Standard Method of Test for Critical Radiant Flux of Floor Covering Systems
Using a Radiant Heat Energy Source
NFPA 255
UL 2360
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4.1 METALS
Stainless Steel
Stainless Steel with Halar or Teflon coating
Copper pipe or tubing
Brass pipe or tubing
Galvanized steel
Anodized aluminum, in general, as used in construction materials
Application: Galvanized steel is used in exhaust duct, occasionally for some limited
framework. Located in sub-fab and maintenance chases not in the main cleanroom. Occasionally may be painted, but usually is left uncoated and exposed.
Used to make up air duct, pipe support hangers, chilled water pipe, all-thread
hanger rods, Unistrut pipe supports, air plenum dividers (below and above clean
room envelop). All make up air handlers, transfer fans, etc. This material is the
basic backbone of the air distribution and heating/ cooling piping system in cleanrooms.
Restriction: Generally all the ductwork in the cleanroom is made of stainless steel - both
for cosmetic and performance reasons. Any transition to other material should be
made below the floor or in the maintenance chase.
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4.2 PLASTICS
4.2.1 Piping, Ducting and Tubing
PVC, CPVC, Corzan CPVC, UPVC
Restriction: Cannot be used for DI Water supply or recirculation due to chloride leaching.
Not for use in the cleanroom upstream of any process equipment or potential
product.
CDA (Clean Dry Air) Chemtrol piping, Chem-Aire
PVC Glues & Cements
Restriction: Not for use in the cleanroom upstream of any process equipment or potential
product.
PVDF (Polyvinylidene fluoride) Pipe & Fittings
Pheumatic control plastic tubing
ATS Duct Work
Application: Used in most wash operations, plating, wet bench exhaust. ATS is a non
combustible, chemical resistant duct specifically intended for exhaust ducting
without sprinkler heads (without sprinkler heads is not approved in all government regulatory jurisdictions). This is the preferred type of duct for cleanrooms.
The corrosion resistant interior liner consists of a synthetic veil and glass reinforcement and vinyl ester resin. The exterior is fabricated with fire resistant phenolic resin.
Restriction: Can only be installed when not exposed to the "clean side" of the production
space due to outgassing of resin.
Fiberglass Duct Work
Application: Used in most wash operations, plating, wet bench exhaust. Used because of
its corrosion resistance properties to convey a wide range of acid exhaust vapors.
The option to this is lined steel exhaust duct, generally more expensive. The duct
is installed below raised floor, interstitial space, or return air space. The exterior
surface is a resin rich glass finish. Some manufacturers apply a paint coating.
Restriction: Can only be installed when not exposed to the "clean side" of the production
space due to outgassing of resin and Silicon Dioxide.
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4.2.2 Sheet Materials with a surface area < 144 square inches
Polycarbonate sheet material
Plastic stick on labels for identification
Phenolic engraved plates for equipment identification
Electrical cable insulation (IT, electrical power, control)
Plastic Face Plate of the Electrical power, lighting & IT points and its power points
4.5 COATINGS
Powder Coated Surfaces
Restriction: Surface areas of 250 square inches or less would be exempt while larger
surface areas would require testing.
Baked Enamel Finishes (volatiles released during bake)
Restriction: Surface areas of 250 square inches or less would be exempt while larger
surface areas would require testing.
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6.1 Review the materials Material Safety Data Sheet (MSDS) with the below Cleanroom Construction Material Categories
If the MSDS meets all the requirements below, go to Section 7.
If the MSDS does not meet all the requirements below, Do Not Use product.
6.1.1 Air ducting, electrical panel boards, switch boxes, lighting fixtures, conduits, and similar items.
No exposed silicone sealants or silicone caulking compounds are permitted in clean rooms or
in sealing of air ducting, electrical panel boards, switch boxes, lighting fixtures, conduits, and
similar items.
6.1.2 Foams, tiles, gaskets, or molded plastics
No flame retardants such as organobromines, organophosphates compounds, or asbestos are
permitted in any foams, tiles, gaskets, or molded plastics used in the clean room.
6.1.3 Adhesives, sealants (especially compounds used to seal HEPA/ULPA filters in holding brackets)
No organophosphates, organochlorophosphates (for example: tricresylphosphate) are
permitted as flame retardants in any adhesives or sealants used in the clean room.
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7.3 Documentation
Samples for testing must be submitted with a MSDS report and technical data sheet. A copy of the
MSDS report is required for each carrier handling the shipment as well as for Customs. Three extra sets
of the required documentation should be included. The cleanroom use application of the sample should
be clearly identified. A bound set of the required documentation should be sent separately to the test
laboratory manager and the designated Seagate Project Manager. In the case of stainless steel parts,
vendor must supply certification of passivation or electropolishing treatment.
7.4 Traceability
The sample manufacturers name, key contract, address and phone number should accompany the
shipment along with lot number, expiration date, and instructions for use. No testing will be done without
documentation indicating the traceability of the sample.
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Amount
Surface area
2 - 3 mm thick
3.5 cm by 3.5 cm
3.5 cm by 3.5 cm
Spread sample using a single edge razor blade. The actual cured sample size must be 3.5 cm by 3.5
cm while the aluminum foil must be no smaller than 4.0 cm by 4.0 cm to allow the excess foil to be
trimmed off without cutting into the test sample to avoid creating an exposed cut edge.
Grease, lubricant and paint coating samples must be spread out as a thin film with a sample weight
minimum of about 10 mg, +/- 1 mg.
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8 FTIR ANALYSIS
Perform FTIR Analysis per 20800014-001 to detect siloxanes, amides, phthalate esters and flame
retardants in the following general categories, but not limited to:
Sealants, Caulking, Mastics, Adhesives (including tile beading)
Grease, Lube, Signs, Polyethylene Sheeting, Paint Coating,
Non-Metallic Ceiling Components, Gasket, Foams, Molded
Plastics, HEPA & ULPA Filters, Plastics and Tapes
Metal, Alloys
(panels, sheets),
Dissimilar Metals
9 IONIC CONTAMINATION
Use the method defined in Seagate Specification 20800012-001 for aqueous extraction of ions.
In the following general categories, but not limited to:
Sealants, Caulking, Mastics, Adhesives (including tile beading) Metal, Alloys
Grease, Lube, Signs, Polyethylene Sheeting, Paint Coating,
(panels, sheets),
Non-Metallic Ceiling Components, Gasket, Foams, Molded
Dissimilar Metals
Plastics, HEPA & ULPA Filters, Plastics and Tapes
Floor Tile
Conduct this test at 80 +/- 5 C for 1 hour. Minimum surface area required is 100 cm2. The volume of DI
water used should be sufficient to submerge the sample with a minimum of 20 ml of DI water used for
an extraction. The ratio of the volume of DI water used (in ml) to the total area (in cm2) of the parts
extracted must be as close to one as possible.
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9.1
Total Anions
0.20
Chloride
0.10
Sulfate
0.10
Bromide
0.10
Fluoride
0.10
Nitrate
0.10
Nitrite
0.10
Phosphate
0.10
Cations
Ammonium
Floor Tile
For Cleanroom Construction Materials, sample must be heated at 50C+/- 2C (122F +/- 5F) for 4
hours which represents worst case Cleanroom conditions.
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Controlled Chemicals
15**
Siloxane
15
100
Ethyl Hexanol
1,000
1,200
4,000
Methacrylates/Alkyl Acrylates
1,100
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BHT
400
250
Amides (Acrylamide)
20
30
Caprolactam
1,500
Benzoic Acid
1,000
1,300
3,000
700
Dioctyl Sebacate
100
Sulfur
10**
10
Hydrocarbons
20,000
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Controlled Chemicals
Other Acids
1,250*
Alcohols, >C7
400*
Hydroxybenzenes
400*
Glycol Ethers
200
N-substituted Pyrrolidinone
100
Other Compounds
1000
Total Outgassing
40,000
To use hexadecane as an internal standard, build calibration curves for controlled compounds using
hexadecane (1,000 ng) as an internal standard on ChemStation Software. For compounds not
controlled, assume hexadecane response factor of 1.
11 CORROSION
All stainless steel parts, for example: screws, nuts, panels, or sheets, must be passivated or
electropolished to prevent corrosion leading to the formation of rust particles. Passivation of free
machining stainless steels is a difficult process, and may result in the formation of corrosive byproducts.
The use of high Cr (Chromium), (>19%), stainless steels (such as DHS2 and SF20T) that contain Mo
(Molybdenum), greatly improves corrosion resistance. These stainless steels have been demonstrated
to meet the acceptance criteria of this specification.
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12 ESD PROPERTIES
12.1 Acceptance Criteria for Conductive and Static Dissipative Materials
All non-metallic surfaces should be either conductive or dissipative. The electrical resistance of
conductive non-metallic surfaces in electrostatic discharge sensitive areas shall be < 1 x 105 ohms per
ST1027.
The electrical resistance of static dissipative non-metallic surfaces in clean room applications shall be
> 1 x 105 ohms and < 1 x 109 ohms per ST1027.
Vendor must provide certification of compliance with the above requirements.
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13 FIRE PROTECTION
13.1 Flammability Acceptance Criteria
Cleanroom walls, ceilings and partitions as well as assemblies using adhesives, must have a Flame
Spread Index (FSI) of 25 or less and a Smoke Density Index (SDI) of 50 or less when tested in
accordance with ASTM E-84/NFPA 255. Cleanroom floor materials must have a Critical Radiant Flux of
Class 1 when tested in accordance with ASTM E-648/NFPA 253 and a Smoke Density of 450 or less
when tested in accordance with ASTM E-662.
Per ASTM E-84/NFPA 255
Flame Spread Index
25
50
25
50
450
per ASTM E-662
Cleanroom floor
Flexible plastics used in cleanrooms as partitions for contamination control or other operational
purposes must meet FM4910 or UL2360 standards for flammability and smoke generation
requirements.
Where FM4910 or UL2360 compliant materials are not suitable for the application, PC350 plastic sheets
may be used. Where other materials are proposed for the application, a formal deviation request must
be submitted for approval per CSOPEHS109.
Supplier must provide applicable certification of compliance for the construction material per
requirements stated above.
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14 APPENDIX A
Cleanroom Construction Material Qualification Process: Flowchart, pages 19-20
The general process flow for a new material qualification.
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EXAMPLE
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