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M. Mansoor1,*, I. Haneef1,2, S. Akhtar1, M. A. Rafiq3, S. Z. Ali4, F. Udrea2,4
Institute of Avionics and Aeronautics, Air University, Sector E-9, Islamabad, Pakistan
2
Department of Engineering, University of Cambridge, Cambridge CB3 0FA, UK
3
Pakistan Institute of Engineering and Applied Sciences, Nilore, Islamabad, Pakistan
4
Cambridge CMOS Sensors Ltd, St Andrews House, 59 St Andrews Street, Cambridge CB2 3BZ, UK
*mohtashimmansoor@gmail.com
1
I. INTRODUCTION
The past two decades have witnessed a tremendous growth
of Micro-electro-mechanical systems (MEMS) sensors market
[1]. MEMS sensors are fast replacing conventional sensors
due to their small size, minimal weight, low volume, lower
power consumption, lower cost and enhanced performance.
Although discrete sensors capable of independently measuring
key fluid dynamics parameters like temperature, pressure and
flow rate exist, but simultaneous measurement of these
parameters is of utmost importance for many applications.
A number of researchers have demonstrated the
advantages of using multiple sensors on a single MEMS chip
[2-7]. Use of multiple sensors on a single chip makes it
possible for designing an application specific sensor system.
For example, [2, 6] have arranged five clusters of shear stress,
temperature and pressure sensors in a one dimensional array
for simultaneous measurements in micro-channels. CMOS
(Complementary Metal Oxide Semiconductor) technology for
fabrication of single chip gas detection system with capacitive,
calorimetric and temperature sensors along with necessary
driving and signal conditioning circuitry has been reported by
[3]. Similarly, [4] have used a multi-sensor system capable of
measuring mass flow rate, fluid density and temperature for
This work was supported in part by Higher Education Commission (HEC)
of Pakistan through HEC Startup Grant and British Council / HECs joint
INSPIRE grant (SP-225) awarded to I Haneef. Partial support provided by the
EU FP7 project SOI-HITS (288481) for this research work to S. Z. Ali and
F. Udrea is also gratefully acknowledged.
Pressure Sensor
Temperature
Sensors
1T
(1)
(2)
34 m
Multi sensor
MEMS chip
REFERENCES
Sensitivity : 0.4734 mV/V/psi
Non-linearity : 0.25%
V. CONCLUSION
One of the biggest advantages offered by MEMS sensors is
integration of multiple sensors in a chip for application
specific system. We have successfully designed, fabricated
and characterized a multi-sensor SOI CMOS MEMS chip
capable of sensing temperature, pressure and flow
ratesimultaneously. The three parameters sensed are of key
importance for aerospace engineers, and researchers and
scientists dealing with fluid dynamics. All three types of
sensors have been characterized in independent calibration
setups. Temperature is sensed by diode temperature sensors,
which have shown a sensitivity of -1.61 mV/C and -1.77
mV/C for driving current of 1A and 150 nA, respectively.
Repeatability tests between sensors of different multi-sensor
MEMS chips have shown excellent results. Pressure sensor
(square diaphragm with embedded piezoresistors) has shown
sensitivity of 0.4734 mV/Vexcit/psi with 0.25% non-linearity.
Flow rate sensors were operated in constant current mode and
calibrated in a micro-channel within the range of 0-10
standard cubic feet per hour (scfh).
The multi-sensor chip has many potential applications
including verification of CFD results in a flow problem, tests
in wind tunnel and micro channels as well as real time
parameter monitoring on actual aerodynamic surfaces.
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