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Wyant 1
8. Multilayer Films
Optical surfaces having virtually any desired reflectance and transmittance characteristics may be
produced by means of thin film coatings. The purpose of this chapter is to find an orderly method for
analyzing multi-layer thin films. We will first derive the characteristic matrix. From the elements of the
characteristic matrix we will solve for the coefficients of reflection and transmission. Then we will look
at examples of anti-reflection coatings and high-reflectance coatings.
8.1 Theory
1
Tangential components of E and H are continuous at an interface. (Figure 1 is from Optics by Hecht.)
Figure 1
MultilayerFilms.nb Optics 505 - James C. Wyant 2
Boundary I
H = $%%%%%%%% $%%%%%%%%%%%%%%
o c
nk E ; n
o v o o
Boundary II
EII = EiII + ErII = EtII (3)
Let
ko Hn1 d Cos@iII DL = ko h
Therefore
ko h
EiII = EtI ko h
; ErII = ErII
'
Note that the sign of the exponent is different from some books because I write Hkz-wtL instead of
- Hkz-wtL . Thus the boundary conditions at boundary II can be written as
ko h
EII = EtI ko h
+ E'rII (5)
and
where
MultilayerFilms.nb Optics 505 - James C. Wyant 3
1 = $%%%%%%%% n Cos@iII D;
o
o 1
If we went through the same derivation for E in the plane of incidence we would obtain a similar
equation except
"######
o #
Cos@iII D
o n1
1 = ;
In matrix notation
Sin@ko hD 1
J N=J N.J II N
EI Cos@ko hD E
(9)
HI 1 Sin@ko hD Cos@ko hD HII
or
J N = MI .J II N
EI E
(10)
HI HII
The characteristic matrix MI relates the field at two adjacent boundaries.
If two overlaying films are deposited on one substrate there would be three boundaries and
J N = MII .J III N
EII E
(11)
HII HIII
For p layers
J N = MI .MII Mp J N
EI Ep+1
(12)
HI Hp+1
M = MI .MII Mp = J N
m11 m12
(13)
m21 m22
To see how this fits together we will derive the expression for the amplitude coefficient of reflection and
transmission. Let
o = $%%%%%%%% n Cos@iI D;
o
o o
s = $%%%%%%%% n Cos@tII D;
o
o s
J N = J 11 12 N.J N
HEiI ErI L o
EiI + ErI m m EtII
m21 m22 EtII s
Let
MultilayerFilms.nb Optics 505 - James C. Wyant 4
ErI EtII
r= ; t= ;
EiI EiI
Then
1 + r = m11 t + m12 s t
H1 rL o = m21 t + m22 s t
Consequently,
2 o Hm11 m12 s L
r = TogetherA1 E
m21 + m11 o + m22 s + m12 o s
m21 + m11 o m22 s + m12 o s
m21 + m11 o + m22 s + m12 o s
2 o
t= ;
m21 + m11 o + m22 s + m12 o s
Therefore for any combination of films we only need to compute the characteristic matrix and substitute
the matrix elements into the above.
iI = 0; iII = 0; tII = 0;
Sin@ko hD 1
M =J N
Cos@ko hD
1 Sin@ko hD Cos@ko hD
r1 = r;
r1 = Simplify@r1 .
8m11 Cos@ko hD, m12 Sin@ko hD 1 , m21 1 Sin@ko hD, m22 Cos@ko hD<D
Sin@h ko D 21 + Cos@h ko D 1 Ho s L + Sin@h ko D o s
Sin@h ko D 21 + Sin@h ko D o s + Cos@h ko D 1 Ho + s L
Hn1 dL;
2 o
ko h = n1 d =
o 4
R1 . ko h
Hn21 + no ns L
2
Hn21 + no ns L
2
!!!!!!!!!!!
R1 = 0 if n1 = no ns
!!!!!!!
If no = 1 and ns = 1.5 , n1 = 1.5 = 1.225.
Commonly use Mg F2 which has an index of 1.38 which is larger than desired. However, a single 1/4 l
layer reduces the reflectance from 4% to approximately 1% over the entire visible spectrum.
The reflectance can be reduced by using a double layer l/4 AR coating. As an example, put index n2 on
the substrate and index n1 on top of n2 .
M = M1 .M2
1 2
M=J N.J N MatrixForm
0 0
i 0 y
1 2
j z
0 0
j
j z
j 0 1 z
z
2
1
k 2 {
Since gi = $%%%%%%%%
eo
ni
mo
i n21 0 y
M =j
j
j
j 0
z
z
z;
nn12 z
n
k {
R2 = J N ;
m11 o m22 s 2
m11 o + m22 s
R2 = i
j n2 no ns n1 yz ;
k n2 no + ns n21 {
2 2 2
R2 = 0 if J N =
n2 2 ns
n1 no
Thus, n2 > n1 .
Common materials for the high refractive index are zirconium dioxide, n = 2.1; titanium dioxide, n= 2.4;
zinc sulfide, n = 2.32. Common materials for the low refractive index are magnesium fluoride, n = 1.38
and cerium fluoride, n = 1.63.
By using two layers, one of high index and one of low index, zero reflectance can be obtained at one
wavelength. Three layers can give zero reflectance at two wavelengths, etc.
MultilayerFilms.nb Optics 505 - James C. Wyant 6
i H nn21 L
j y
z
j
M =j z
z;
j n1 p z
p
H L
0
k 0 n2 {
i no H nn21 L ns H nn12 L y
R2 p = j
j
j
z
z
z ;
2
k no H n1 L + ns H n2 L
p p
{
n2 p n1 p
i
j I M y
z
j 1 z
=j
j z
z
2p 2
j z
ns n1
j
j z
z
I M
no n2
k 1+ {
R2 p ;
ns n1 2p
no n2
J N = s
n2 2 p n
n1 no
Therefore, n2 > n1 .
For high reflectance we want n2 >> n1 or n2 << n1 . Since ns > no , the result will converge a little faster
if n1 > n2 . The reflectance becomes higher as p increases. For a given p, the larger the ratio of refractive
indices the better we are.
Having n1 > n2 helped increase the reflectance. If p becomes 8 (16 layers) the reflectivity is greater than
99.9%.
The following plot shows the reflectance as a function of p, the number of n1 n2 layers.
MultilayerFilms.nb Optics 505 - James C. Wyant 7
0.9
Reflectance
0.8
0.7
0.6
0.5
0.4
2 4 6 8 10
p, number of n1 and n2 layers
By using various combinations of quarter-wave stacks it is possible to make band pass filters, high pass
filters, low pass filters, etc. An excellent book on the topic is Thin-Film Optical Filters by H. A.
Macleod.