The largest FPD glass substrate transfer clean robot

SC400LC

Flexible transfer with its 6 axes structure.

Picking up vertically, rotation, and any other transfer is
possible

Powerful payload with Large envelope.

Enough arm length and envelope to transfer the 10th
generation glass substrate Max. reach 3.6m, Up/Down
envelope 4.8m
 The largest FPD glass substrate transfer clean robot

SC400LC
Item Specifications
Operating envelope
Robot model
SC400LC-01

Structure Articulated

Number of axes 6

Drive system AC servo system

J1 ±2.62rad
（±150°
）
Swivel
J2 ＋1.83∼−0.44rad
（+105°
∼ー25°
）
Arm Upward/downward
J3 ＋2.09∼−0.44rad
（+120°
∼ー25°
）
Forward/backward
Max. operating
area J4 ±5.24rad
（±300°
）
Rotation2
J5 ±2.09rad
（±120°
）
Wrist Bend
J6 ±6.28rad
（±360°
）
Rotation1
J1 1.40rad/s
（80°
/s）
Swivel
J2 1.40rad/s
（68°
/s）
Arm Upward/downward
J3 1.40rad/s
（80°
/s）
Forward/backward
Max. velocity
J4 1.57rad/s
（90°
/s）
Rotation2
J5 1.57rad/s
（90°
/s）
Wrist Bend
J6 2.53rad/s
（145°
/s）
Rotation1

Wrist 400kg

Payload Forearm 10kg

Arm
J3 forearm 30kg

J4 1960N・m
Rotation2
Allowable static load J5 1960N・m
Bend
torque
J6 980N・m
Rotation1
J4 200kg・m2
Rotation2
許容最大慣性モーメント
Max. allowable moment J5 200kg・m2
Bend
of inertia
J6 147kg・m2
Rotation1
ISO 14644-1 CLASS 6
Clean rating 14644-1 CLASS 6 compliant

Repeatability ±0.5mm

Ambient temperature 10∼30℃

20∼85％RH
Ambient humidity （Without condensation)
0.5G以下
Vibration Not more than 0.5G

Installation Shelf

Robot mass
3800kg

1［rad］= 180/μ［°］, 1［N・m］=1/9.8［kgf・m］

To mount a load to the robot arm, it must be loaded either to the forearm or to the upper part of the J3 axis.

Operating Case

斜度の異なる搬送装置間の移送にもフレキシブルに対応。
Possible to transfer for changing angle of position.

CATALOG NO. 7920-2

2012.05.Y-ABE-ABE