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Y Dong et al
and is given by
ε0 Afb Vfb2
Kfb = sgn(YOUT ) (3)
2[d0 + sgn(YOUT )(x)]2
K0
= sgn(YOUT ) (4)
[1 + sgn(YOUT )(x/d0 )]2
where K0 = ε0 Afb Vfb 2d02 and denotes the gain of the
2
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Force feedback linearization for higher-order electromechanical sigma–delta modulators
fbw
Pnoise = |NTF(j 2πf )PSD(EQN (j 2πf ))|2 df
−fbw
fbw
Pdistortion = |STF(j 2πf )PSD(EDAC1 (j 2πf ))|2 df
−fbw
(6)
where Psignal , Pnoise and Pdistortion and are the power of
the input signal, quantization noise and distortion of
the electrostatic force conversion in the signal bandwidth
fbw , respectively; PSD(XIN (j 2πf )), PSD(EQN (j 2πf )) and
PSD(EDAC1 (j 2πf )) and are the PSD of input signal,
quantization noise and distortion of electrostatic force
conversion, respectively. For the parameters used in the
simulations the SNDR was calculated to be about 90 dB.
For high performance sensing elements with a lower spring
constant the residual motion can be considerably higher; thus
the maximum achievable SNDR without electrostatic force
feedback linearization is even lower.
Figure 5. Variation of the feedback force magnitude due to residual
proof mass motion.
3. Feedback electrostatic force linearization
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Y Dong et al
Figure 7. The modified electrostatic force feedback arrangement of the electromechanical M.
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Force feedback linearization for higher-order electromechanical sigma–delta modulators
4. Experimental results
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Y Dong et al
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