Shin-Etsu Chemical Co.

, Ltd
Instrument List
(*) Determined at detail engineering
SECTION TYPE OF
NO. TAG.No. P&ID No. SERVICE NAME FLUID CONDITION
No. INSTRUMENT
DESIGN DIF. DESIGN
FLUID PHASE MAX.FLOW NOR.FLOW MIN.FLOW PRESSURE TEMP. DENSITY VISCOSITY
PRESSURE PRESSURE TEMP.

1 EV-A1101 DGA-11121-01 1100A RCL Line to OSBL EV Automatic Valve RCL Gas 2524.47 Nm3/h 1941.9 Nm3/h 582.57 Nm3/h 6.00 kgf/cm2G 2.00 kgf/cm2G - 60.0 deg C 40.0 deg C 3.2 kg/Nm3 0.014 cP

2 EV-A1102 DGA-11121-01 1100A MX-A1101/1,2 CL Feed EV Automatic Valve CL Gas 2524.47 Nm3/h 1941.9 Nm3/h 582.57 Nm3/h 6.00 kgf/cm2G 2.00 kgf/cm2G - 60.0 deg C 40.0 deg C 3.2 kg/Nm3 0.014 cP

3 EV-A1103 DGA-11121-01 1100A CL Line N3 Feed EV Automatic Valve N3 Gas 37.05 Nm3/h 28.5 Nm3/h 8.55 Nm3/h 6.00 kgf/cm2G 3.00 kgf/cm2G - 60.0 deg C 30.0 deg C 4.4 kg/m3 0.018 cP

4 EV-A1104 DGA-11121-01 1100A RG Line MT Feed EV Automatic Valve MT Gas 128.57 Nm3/h 98.9 Nm3/h 29.67 Nm3/h 6.00 kgf/cm2G 2.00 kgf/cm2G - 60.0 deg C 40.0 deg C 0.7 kg/Nm3 0.012 cP

HF-A1101/1,2,3,4,5,6,7 MT Feed
5 EV-A1105 DGA-11121-01 1100A Automatic Valve MT Gas 140.4 Nm3/h 108.0 Nm3/h 32.4 Nm3/h 6.00 kgf/cm2G 2.00 kgf/cm2G - 60.0 deg C 40.0 deg C 0.7 kg/Nm3 0.012 cP
EV

6 FG-A1102 DGA-11121-01 1100A CL Line N3 Feed Flow Area Flowmeter N3 Gas 37.05 Nm3/h 28.5 Nm3/h 8.55 Nm3/h 6.00 kgf/cm2G 3.00 kgf/cm2G 60.0 deg C 30.0 deg C 4.4 kg/m3 0.018 cP

7 FI-A1101 DGA-11121-01 1100A MX-A1101/1,2 CL Feed Flow Flowmeter CL Gas 2524.47 Nm3/h 1941.9 Nm3/h 582.57 Nm3/h 6.00 kgf/cm2G 2.00 kgf/cm2G 60.0 deg C 40.0 deg C 3.2 kg/Nm3 0.014 cP

8 FI-A1103 DGA-11121-01 1100A RCL Line to OSBL Flow Flowmeter RCL Gas 2524.47 Nm3/h 1941.9 Nm3/h 582.57 Nm3/h 6.00 kgf/cm2G 2.00 kgf/cm2G 60.0 deg C 40.0 deg C 3.2 kg/Nm3 0.014 cP

9 FI-A1104 DGA-11121-01 1100A MX-A1101/1 CL Feed Flow Flowmeter CL Gas 1262.235 Nm3/h 971.0 Nm3/h 291.285 Nm3/h 6.00 kgf/cm2G 2.00 kgf/cm2G 60.0 deg C 40.0 deg C 3.2 kg/Nm3 0.014 cP

10 FI-A1105 DGA-11121-01 1100A MX-A1101/2 CL Feed Flow Flowmeter CL Gas 1262.235 Nm3/h 971.0 Nm3/h 291.285 Nm3/h 6.00 kgf/cm2G 2.00 kgf/cm2G 60.0 deg C 40.0 deg C 3.2 kg/Nm3 0.014 cP

11 FI-A1109 DGA-11121-01 1100A MX-A1101/1,2 RG Feed Flow Flowmeter RG Gas 10333.57 Nm3/h 7948.9 Nm3/h 2384.67 Nm3/h 6.00 kgf/cm2G 1.00 kgf/cm2G 60.0 deg C 35.0 deg C 1.8 kg/Nm3 0.013 cP

12 FI-A1110 DGA-11121-01 1100A MX-A1101/1 RG Feed Flow Flowmeter RG Gas 5166.785 Nm3/h 3974.5 Nm3/h 1192.335 Nm3/h 6.00 kgf/cm2G 1.00 kgf/cm2G 60.0 deg C 35.0 deg C 1.8 kg/Nm3 0.013 cP

13 FI-A1111 DGA-11121-01 1100A MX-A1101/2 RG Feed Flow Flowmeter RG Gas 5166.785 Nm3/h 3974.5 Nm3/h 1192.335 Nm3/h 6.00 kgf/cm2G 1.00 kgf/cm2G 60.0 deg C 35.0 deg C 1.8 kg/Nm3 0.013 cP

14 FI-A1112 DGA-11121-01 1100A RE-A1101/1 RG Feed Flow Flowmeter RG Gas 1836.9 Nm3/h 1413.0 Nm3/h 423.9 Nm3/h 2.00 kgf/cm2G 0.80 kgf/cm2G 60.0 deg C 35.0 deg C 2.1 kg/Nm3 0.013 cP

15 FI-A1114 DGA-11121-01 1100A RE-A1101/2 RG Feed Flow Flowmeter RG Gas 1836.9 Nm3/h 1413.0 Nm3/h 423.9 Nm3/h 2.00 kgf/cm2G 0.80 kgf/cm2G 60.0 deg C 35.0 deg C 2.1 kg/Nm3 0.013 cP

16 FI-A1116 DGA-11121-01 1100A RE-A1101/3 RG Feed Flow Flowmeter RG Gas 1836.9 Nm3/h 1413.0 Nm3/h 423.9 Nm3/h 2.00 kgf/cm2G 0.80 kgf/cm2G 60.0 deg C 35.0 deg C 2.1 kg/Nm3 0.013 cP

17 FI-A1118 DGA-11121-01 1100A RE-A1101/4 RG Feed Flow Flowmeter RG Gas 1836.9 Nm3/h 1413.0 Nm3/h 423.9 Nm3/h 2.00 kgf/cm2G 0.80 kgf/cm2G 60.0 deg C 35.0 deg C 2.1 kg/Nm3 0.013 cP

18 FI-A1120 DGA-11121-01 1100A RE-A1101/5 RG Feed Flow Flowmeter RG Gas 1836.9 Nm3/h 1413.0 Nm3/h 423.9 Nm3/h 2.00 kgf/cm2G 0.80 kgf/cm2G 60.0 deg C 35.0 deg C 2.1 kg/Nm3 0.013 cP

19 FI-A1122 DGA-11121-01 1100A RE-A1101/6 RG Feed Flow Flowmeter RG Gas 1836.9 Nm3/h 1413.0 Nm3/h 423.9 Nm3/h 2.00 kgf/cm2G 0.80 kgf/cm2G 60.0 deg C 35.0 deg C 2.1 kg/Nm3 0.013 cP

20 FI-A1124 DGA-11121-01 1100A RE-A1101/7 RG Feed Flow Flowmeter RG Gas 1836.9 Nm3/h 1413.0 Nm3/h 423.9 Nm3/h 2.00 kgf/cm2G 0.80 kgf/cm2G 60.0 deg C 35.0 deg C 2.1 kg/Nm3 0.013 cP

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 SECTION TYPE OF
NO. TAG.No. P&ID No. SERVICE NAME FLUID CONDITION
No. INSTRUMENT
DESIGN DIF. DESIGN
FLUID PHASE MAX.FLOW NOR.FLOW MIN.FLOW PRESSURE TEMP. DENSITY VISCOSITY
PRESSURE PRESSURE TEMP.

21 FIC-A1102 DGA-11121-01 1100A MX-A1101/1,2 CL Feed Flow Flowmeter CL Gas 2524.47 Nm3/h 1941.9 Nm3/h 582.57 Nm3/h 6.00 kgf/cm2G 2.00 kgf/cm2G 60.0 deg C 40.0 deg C 3.2 kg/Nm3 0.014 cP

23 FIC-A1106 DGA-11121-01 1100A RG Line MT Feed Flow Flowmeter MT Gas 128.57 Nm3/h 98.9 Nm3/h 29.67 Nm3/h 6.00 kgf/cm2G 2.00 kgf/cm2G 60.0 deg C 40.0 deg C 0.7 kg/Nm3 0.012 cP

25 FIC-A1107 DGA-11121-01 1100A RG Line N3 Feed Flow Flowmeter N3 Gas 109.2 Nm3/h 84.0 Nm3/h 25.2 Nm3/h 6.00 kgf/cm2G 3.00 kgf/cm2G 60.0 deg C 30.0 deg C 4.4 kg/m3 0.018 cP

27 FIC-A1108 DGA-11121-01 1100A MX-A1101/1,2 RG Feed Flow Flowmeter RG Gas 10333.57 Nm3/h 7948.9 Nm3/h 2384.67 Nm3/h 6.00 kgf/cm2G 1.00 kgf/cm2G 60.0 deg C 35.0 deg C 1.8 kg/Nm3 0.013 cP

29 FIC-A1113 DGA-11121-01 1100A HF-A1101/1 MT Feed Flow Flowmeter MT Gas 18.2 Nm3/h 14.0 Nm3/h 4.2 Nm3/h 6.00 kgf/cm2G 2.00 kgf/cm2G 60.0 deg C 40.0 deg C 0.7 kg/Nm3 0.012 cP

31 FIC-A1115 DGA-11121-01 1100A HF-A1101/2 MT Feed Flow Flowmeter MT Gas 18.2 Nm3/h 14.0 Nm3/h 4.2 Nm3/h 6.00 kgf/cm2G 2.00 kgf/cm2G 60.0 deg C 40.0 deg C 0.7 kg/Nm3 0.012 cP

33 FIC-A1117 DGA-11121-01 1100A HF-A1101/3 MT Feed Flow Flowmeter MT Gas 18.2 Nm3/h 14.0 Nm3/h 4.2 Nm3/h 6.00 kgf/cm2G 2.00 kgf/cm2G 60.0 deg C 40.0 deg C 0.7 kg/Nm3 0.012 cP

35 FIC-A1119 DGA-11121-01 1100A HF-A1101/4 MT Feed Flow Flowmeter MT Gas 18.2 Nm3/h 14.0 Nm3/h 4.2 Nm3/h 6.00 kgf/cm2G 2.00 kgf/cm2G 60.0 deg C 40.0 deg C 0.7 kg/Nm3 0.012 cP

37 FIC-A1121 DGA-11121-01 1100A HF-A1101/5 MT Feed Flow Flowmeter MT Gas 18.2 Nm3/h 14.0 Nm3/h 4.2 Nm3/h 6.00 kgf/cm2G 2.00 kgf/cm2G 60.0 deg C 40.0 deg C 0.7 kg/Nm3 0.012 cP

39 FIC-A1123 DGA-11121-01 1100A HF-A1101/6 MT Feed Flow Flowmeter MT Gas 18.2 Nm3/h 14.0 Nm3/h 4.2 Nm3/h 6.00 kgf/cm2G 2.00 kgf/cm2G 60.0 deg C 40.0 deg C 0.7 kg/Nm3 0.012 cP

41 FIC-A1125 DGA-11121-01 1100A HF-A1101/7 MT Feed Flow Flowmeter MT Gas 18.2 Nm3/h 14.0 Nm3/h 4.2 Nm3/h 6.00 kgf/cm2G 2.00 kgf/cm2G 60.0 deg C 40.0 deg C 0.7 kg/Nm3 0.012 cP

44 PG-A1101 DGA-11121-01 1100A MX-A1101/1,2 CL Feed Press. Pressure gauge CL Gas 2524.47 Nm3/h 1941.9 Nm3/h 582.57 Nm3/h 6.00 kgf/cm2G 2.00 kgf/cm2G 60.0 deg C 40.0 deg C 3.2 kg/Nm3 0.014 cP

45 PG-A1102 DGA-11121-01 1100A MX-A1101/1,2 CL Feed Press. Pressure gauge CL Gas 2524.47 Nm3/h 1941.9 Nm3/h 582.57 Nm3/h 6.00 kgf/cm2G 2.00 kgf/cm2G 60.0 deg C 40.0 deg C 3.2 kg/Nm3 0.014 cP

46 PG-A1103 DGA-11121-01 1100A RG Line MT Feed Press. Pressure gauge MT Gas 128.57 Nm3/h 98.9 Nm3/h 29.67 Nm3/h 6.00 kgf/cm2G 2.00 kgf/cm2G 60.0 deg C 40.0 deg C 0.7 kg/Nm3 0.012 cP

47 PG-A1104 DGA-11121-01 1100A MX-A1101/1,2 RG Feed Press. Pressure gauge RG Gas 10333.57 Nm3/h 7948.9 Nm3/h 2384.67 Nm3/h 6.00 kgf/cm2G 1.00 kgf/cm2G 60.0 deg C 35.0 deg C 1.8 kg/Nm3 0.013 cP

HF-A1101/1,2,3,4,5,6,7 MT Feed
48 PG-A1105 DGA-11121-01 1100A Pressure gauge MT Gas 140.4 Nm3/h 108.0 Nm3/h 32.4 Nm3/h 6.00 kgf/cm2G 2.00 kgf/cm2G 60.0 deg C 40.0 deg C 0.7 kg/Nm3 0.012 cP
Press.

49 PI-A1102 DGA-11121-01 1100A RG Line MT Feed Press. Pressure transmitter MT Gas 128.57 Nm3/h 98.9 Nm3/h 29.67 Nm3/h 6.00 kgf/cm2G 2.00 kgf/cm2G 60.0 deg C 40.0 deg C 0.7 kg/Nm3 0.012 cP

50 PI-A1103 DGA-11121-01 1100A MX-A1101/1,2 RG Feed Press. Pressure transmitter RG Gas 10333.57 Nm3/h 7948.9 Nm3/h 2384.67 Nm3/h 6.00 kgf/cm2G 1.00 kgf/cm2G 60.0 deg C 35.0 deg C 1.8 kg/Nm3 0.013 cP

51 PI-A1104 DGA-11121-01 1100A MX-A1101/1,2 RG Outlet Press. Pressure transmitter RG Gas 12858.04 Nm3/h 9890.8 Nm3/h 2967.24 Nm3/h 2.00 kgf/cm2G 0.80 kgf/cm2G 60.0 deg C 35.0 deg C 2.1 kg/Nm3 0.013 cP

52 PIC-1101 DGA-11121-01 1100A CL Main Line Press. Pressure transmitter CL Gas 5139.94 Nm3/h 3953.8 Nm3/h 1186.14 Nm3/h 6.00 kgf/cm2G 2.00 kgf/cm2G 60.0 deg C 40.0 deg C 3.2 kg/Nm3 0.014 cP

MX-A1101/1,2 RG O2
54 QI-A1101 DGA-11121-01 1100A GAS detector(O2) RG Gas 6.00 kgf/cm2G 1.00 kgf/cm2G 60.0 deg C 35.0 deg C 1.8 kg/Nm3 0.013 cP
Concentration

91 XA-A1101 DGA-11121-01 1100A HF-A1101/1 Flame Detector Flame Detector AIR Gas - - - ATM ATM

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 SECTION TYPE OF
NO. TAG.No. P&ID No. SERVICE NAME FLUID CONDITION
No. INSTRUMENT
DESIGN DIF. DESIGN
FLUID PHASE MAX.FLOW NOR.FLOW MIN.FLOW PRESSURE TEMP. DENSITY VISCOSITY
PRESSURE PRESSURE TEMP.

92 XA-A1102 DGA-11121-01 1100A HF-A1101/2 Flame Detector Flame Detector AIR Gas - - - ATM ATM

93 XA-A1103 DGA-11121-01 1100A HF-A1101/3 Flame Detector Flame Detector AIR Gas - - - ATM ATM

94 XA-A1104 DGA-11121-01 1100A HF-A1101/4 Flame Detector Flame Detector AIR Gas - - - ATM ATM

95 XA-A1105 DGA-11121-01 1100A HF-A1101/5 Flame Detector Flame Detector AIR Gas - - - ATM ATM

96 XA-A1106 DGA-11121-01 1100A HF-A1101/6 Flame Detector Flame Detector AIR Gas - - - ATM ATM

97 XA-A1107 DGA-11121-01 1100A HF-A1101/7 Flame Detector Flame Detector AIR Gas - - - ATM ATM

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