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MODELING AND OPTIMIZATION OF MICRO EDM

PROCESS

Muralidhara Research Guide:


ME05D036 Prof. M. Singaperumal

Precision Engineering and Instrumentation Laboratory


Mechanical Engineering Department
Indian Institute of Technology Madras Chennai

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Introduction

¾ Micro EDM is a non-conventional, non-contact


machining process where the material is melted and
removed from the work surface by the sparks produced
between anode and cathode immersed inside the
dielectric medium
¾ Used for machining micro features like through, blind
and tapered micro holes, straight, circular and spiral
micro channels which are used in MEMS devices
¾ Micro EDM is a better alternative to microfabrication
techniques for production of some of the 3D
microstructure in silicon
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Objective
1. To develop a Micro EDM process model considering the heat
generated in the Plasma
2. To develop a model for the piezoelectric actuator considering
Hysteresis effect and to validate the model experimentally
3. To simulate the Micro EDM process based on the developed
models
4. To develop a controller for Micro EDM process for feeding
the tool considering the tool erosion and to achieve the
required depth of micromachining
5. To find the optimum process parameters for a specific tool
and workpiece material
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Block diagram of simulation model

X-Y Stage

Required
Piezoactuator
Depth Model
Total Tool
Feed Reference
V
Optimum Gap
F Micro EDM Controller
DC Model
Actual Gap
(MRR + TWR)

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Proposed Micro EDM Setup
Reference
Open loop gap Feedback V Gap
voltage Voltage Micro EDM
Piezo
- Controller
Open loop V Drive
+
Tool wear
Required - length
Depth Actual +
Depth Tool feed length
Gap Voltage
Piezoactuator
sensor

Amplifier
V F
Pulse Discharge
Dielectric Fluid Control Power
Recirculation circuit supply
Filter System
Duty Cycle

X-Y-θ Table
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In-House developed Micro EDM Set-up

Discharge Piezoelectric
Power Microctuator
Tool feed rate
supply Driver
Controller

Piezoactuator Z

Pulse
Voltage Control X
Reference Gap
circuit Amplifier Voltage

Duty Cycle Frequency Gap


Voltage

Tool
Workpiece

X-Y-θ Table

Fig. 1 Micro EDM Set-up

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Silicon Micromachining using Micro EDM
• Silicon Wafer Details:
630µm thick, 0.1Ωcm resistivity
• Machining time: 7 minutes
• Tool Diameter outer:1.57mm, Inner: 0.54mm
• 2D View from Surface Profiler

F = 4.3kHz
600µm
D.C. = 33.4%
Voltage = 60V
440µm

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3D View of the Machined Structure
Surface roughness can
be improved by
• dielectric fluid filtering
and recirculation
• careful selection of
machining parameters
• selecting proper polarity
• giving rotary motions to
the tool
• roughing operations at
higher voltage and
finishing operations at
lower voltage
• Post process treatments
like etching

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Model For Piezoelectric Actuator

Mechanical
Vin Vt Ft x •
T Model for
+ q
- Piezoactuator +
VH +
VtCp VH
Cp
T H x
Tx
-
+
Hysteresis
Model for
q + Vin + •

qt m
Piezoactuator q x
q = Tx + Cp Vt Vt C T T Ft=TVt
k b
Vin = VH + Vt Vt Ft
VH = H(q) -
Ft = T Vt -
mx&& + bx& + kx = Ft

⎪⎪
(
⎧ q − qb ) (
q − qbi )< vi

⎪⎪
The voltage across the hysteresis element is given by
i
if
Vi = ⎨ Ci Ci ⎬
⎪ ⎪
⎪⎩Vi sgn ( i ) and qbi = q − Ci vi sgn ( i ) else ⎭⎪
n
VH =∑ Vi
i =1
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Work to be Done

1. Simulation for displacement of piezoelectric actuator


using the developed model
2. Experimental determination of feed back gap voltage
corresponding to a gap width which will result in sparks
of required characteristics
3. Modeling of workpiece and tool removal process in
Micro EDM by considering the heat generated in
plasma.
• Simulation of Micro EDM process integrating Micro
EDM model with the piezoelectric actuator model
• Designing a control system to control the tool feed rate
considering tool wear rate and MRR
• Experimental validation of the developed Micro EDM
model 10

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