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Outline
Introduction Literature Review. Novel Idea of Design Results and Discussions Conclusion References
INTRODUCTION
Pressure sensing: In vehicles, pressure sensors are used for many applications and their location varies accordingly. Pressure sensor can be done by measuring the pressure difference between the air at the filter intake and air on the other side of the diaphragm. They can also be used to calculate mass airflow rate, engine speed and air temperature by measuring the pressure from intake fold. The pressure sensor devices used in tire pressure monitoring system (TPMS) can be installed inside the tire or mounted on the valve stem.
LITERATURE REVIEW
Sensors are essential component of automotive electronic control systems. Sensors are defined as devices that transform (or transduce) physical quantities such as pressure of acceleration into output signals that serve as inputs for control systems.. MEMS-based automotive sensor technology was recently reviewed by Eddy and Sparks. Franks publication emphasized electronic circuits and sensor include: Wolbers 1978 publication and Heintz and Zablers 1982 publication. Two groups developed automotive sensor - Delco Electronics Group (General Motors) - Ford
Nowadays, there is growing interested in Tire Pressure Measurement Systems (TPMS), which has led to the development of pressure sensors. And data shows that nearly 250,000 accidents per year occur in the USA along due to low tire pressure. To avoid the above, the concept of a TPMS was introduced. Direct TPMS contain small sensors for pressure and acceleration that are installed inside the tires. And since the discovery of the piezoresistive effect, piezoresistive sensor have been widely employed in mechanical signal sensing, which plays a very important role in TPMS.
According publication of author Bian Tian, Jiaotong University, Xian, China. They developed the system TPMS. Through analysis of the stress distribution of the diaphragm by finite element method (FEM) using ANSYS software, a model of the structure was established.
520
Dimention of sensor
Wmask(cal) X
45.00
54.7
150.00
3.00
Lmembrane = 520 m
48.00
Wmask(cal) X
45.00
54.7
150.00
() 450 = = = 225 () 2/
3.00
Lmembrane = 520 m
48.00
Where etch rate of silicon in KOH (19%-80oC): [100:110:111]=[100:16:1] r(100) = 2m/min and r(111) = 0.02m/min But in plane (111) silicon be under-cut pyramid = 111 = 0.02 225 = 4.5
Wmask(real)
s=
4.5
54.7
52.00
Schematic of resistor
P(MPa)
0.2
0.4
0.6
0.8
Vp(mV)
-0.47
15.50
31.41
47.44
63.35
79.29
Vn(mV)
-0.48
15.53
31.46
47.49
63.42
79.29
CONCLUSIONS
CONCLUSIONS
MEMS Piezoresistive Pressure sensor was successfully fabricated with membrane structures of dimension 520m X 520m, and thickness of 30m is realized using anisotropic wet chemical etching technique of bulk silicon. P-type piezoresistors are fabricated by boron diffusion. The sensitivity and measurement range of sensor reached to 79.76 V/kPa and from 0 to 1 Mpa, respectively. Comprehensive results suggested that the pressure sensor for TPMS was a better choice for measuring pressure.
REFERENCES
Oliver Schatz, 0. Recent trends in automotive sensors. IEEE Proc. Sensors 2004, 1, 236-239 Peng, C.T. Lin, J.C., Lin, C.T., Chiang, K.N., Performance and package effect of a novel piezoresistive pressure sensor fabricated by front-side etching technology, Sens. Actuator. A 2005,119, pp 2837 Bian Tian, Y. L Zhao, Z. Jiang, Ling Zhang, Nan sheng Liao, Y. H. Liu and Chao Meng, Fabrication and Structural Design of Micro Pressure Sensors for Tire Pressure Measurement Systems (TPMS) Sensors 2009, 9, 1382-1393; doi: 10.3390/s90301382. William J. Fleming. Overview of Automotive Sensors. IEEE Sensors Journal, Vol 1, No.4, December 2001, pp 296 Z.W. Zhong, X. W. Zhang, H. H. Sim, E. H. Wong, T. S. Teo and M. H. Iyer. Calibration of a Piezoresistive Stress Sensor in (100) Silicon Test Chips. 2002 IEEE. Electronic Technology Conference 2002 Tai-Ran Hsu. MEMS & Microsystems Design and Manufacture, Chine Machine Press: Beijing, 2002