IEEE Robotics and Automation Society Technical Committee (TC) on Semiconductor Manufacturing Automation

Year 2010 Operations Review

IEEE RAS Technical Committee on Semiconductor Manufacturing Automation

http://xs3d.kaist.edu/TC-SMA

Technical C mmittee (TC) Brief Data

URL: http://xs3d.kaist.edu/TC-SMA F unding Date: August 1, 2001 Scope:
To promote basic and applied research in semiconductor manufacturing and automation To provide a forum for exchanging ideas among semiconductor manufacturing researchers and engineers To facilitate related scientific publications and events (such as special conference sessions, workshops, symposia, and special journal issues)

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IEEE RAS Technical Committee on Semiconductor Manufacturing Automation

http://xs3d.kaist.edu/TC-SMA

Face-to-Face TC Meetings
December 2009, Texas, USA (during Winter Sim and MASM) July 2010, San Francisco, USA (during 21st Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference) NEXT MEETING: August 2010, Toronto, Canada (during the 6th IEEE Conference on Automation Science and Engineering)

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IEEE RAS Technical Committee on Semiconductor Manufacturing Automation

http://xs3d.kaist.edu/TC-SMA

Most Recent TC Meeting

(during IEEE/SEMI ASMC 2010)

Attending (from left to right):

Zubin Mevawalla (Ph.D. candidate, Georgia Tech), Jan Rothe (Global Foundries), Haim Albalak (Head, Tefen), James Morrison (Prof., KAIST), Brett Williams (Engineer, ON Semiconductor), Lynn Yuwen Zhang, Ph.D. (Sr. Engineer, Intel), Darryl Peters (Confluence), Fan-Tien Cheng (Prof., National Cheng Kung University), Dave Gross (Director, Global Foundries), Claude Yugma (Prof., Ecole Nationale Superieure des Mines de Saint-Etienne), Agnes Roussy (Prof., Ecole Nationale Superieure des Mines de Saint-Etienne), Kyungsu Park (Ph.D. candidate, KAIST), Gyoungwon Park, Ph.D. (Manager, Finisar)

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IEEE RAS Technical Committee on Semiconductor Manufacturing Automation

http://xs3d.kaist.edu/TC-SMA

Membership
258 TC members All the major institutes and companies across Americas, Europe, and Asia New member recruiting:
August 2008, GOLD (Graduates of the Last Decade) lunch April 2007, GOLD (Graduates of the Last Decade) lunch

Nominations and Awards:

Dev Pillai (Intel Fellow), T-ASE Advisory Board, 2007 Adar Kalir (Intel), T-ASE Associate Editor, 2007 Chen-Fu Chien (TSMC & Tsinghua U), T-ASE Associate Editor, 2007 Mike Tao Zhang, IEEE RAS Early Career Award in Robotics and Automation, 2008 Meng-Chu Zhou, nominated for IEEE RAS Distinguished Lecturer, 2009 Meng-Chu Zhou, selected as Sr. Editor of IEEE T-ASE, 2009

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IEEE RAS Technical Committee on Semiconductor Manufacturing Automation

http://xs3d.kaist.edu/TC-SMA

Committee Board
Honorary Chairs
Dr. Simon Yang, Senior Vice President & Chief Technology Officer, Chartered Semiconductor Manufacturing Co. Dr. Douglas Chen-Hua Yu, Senior Director, Advanced Module Technology Development Division, TSMC MuDer JENG , IEEE Fellow, Professor, Department of Electrical Engineering, National Taiwan Ocean University MengChu ZHOU, IEEE Fellow, Professor, Dept of Electrical and Computer Eng, New Jersey Institute of Technology

Co-Chairs
Thomas Wen-Yao CHEN, Director, Technology System Integration Division, TSMC Mike Tao ZHANG, VP Tianwei New Energy Holdings & Executive Vice President, US-China Green Energy Council James R. Morrison, Assistant Professor, Dept of Industrial and Systems Engineering, KAIST, South Korea

Academy Chair: Prof. Stanley B. Gershwin, Dept of Mechanical Engineering, MIT Industry Chair: Dave Gross, Director, Global Manufacturing Systems Technology, Advanced Micro Devices (AMD) Membership Chair: Dr. Chen-Fu Chien, Deputy Director, Industrial Eng., TSMC Conference Chair: Prof. Shi-Chuang Chang, Dept of Electrical Engineering, National Taiwan University Publication Chair: Prof. Ruey-Shan Andy Guo, Chair, Dept of Business Administration, National Taiwan University Regional Chair, China: Prof. Han Ding, Cheung Kong Chair Professor and Director, Advanced Electronic Mfg Center, Shanghai Jiao Tong Univ. Regional Chair, Europe: Dr. Arieh Greenberg, Senior Principal, Qimonda Regional Chair, Israel: Dr. Adar Kalir, Staff Engineer, Intel Corporation Regional Chair, Japan: Kenji Miyake, Chief Technology Officer, GEN Inc. Regional Chair, Korea: Prof. Tae-Eog Lee, Dept of Industrial Eng, Korea Advanced Institute of Science and Technology Regional Chair, Tai an: Prof. Shi-Chung Chang, Dept of Electrical Eng, National Taiwan University Regional Chair, U.S.A.: Prof. John W. Fowler, Dept of Industrial Engineering, Arizona State University

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IEEE RAS Technical Committee on Semiconductor Manufacturing Automation

http://xs3d.kaist.edu/TC-SMA

Publication Involvement
Special Issue on Equipment and Operations Automation in the Semiconductor Industry, IEEE Transactions on Automation Science and Engineering (T-ASE)
Chen-Fu Chien, Stephane Dauzere-Peres, Milind Dawande, Han Ding, James Morrison, Jeff Pettinato, Jingang Yi (Guest Editors) 32 papers submitted and reviewed; Publication scheduled Jan 2011

Planning for Special Issue on Automation in Green Technology for IEEE Transactions on Automation Science and Engineering (T-ASE)

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IEEE RAS Technical Committee on Semiconductor Manufacturing Automation

http://xs3d.kaist.edu/TC-SMA

Conference Involvement
21st Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference, San Francisco, USA, July 2010
Special session on Reducing Cost and Maximizing Equipment Productivity, co-chair James Morrison

6th Annual IEEE CASE 2010

Special session on Green Tech Automation, chairs James Morrison and Jingshan Li

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IEEE RAS Technical Committee on Semiconductor Manufacturing Automation

http://xs3d.kaist.edu/TC-SMA

Future Development
Membership
Distribute TC poster at conferences and hold TC meeting
2009 Joint Winter Simulation and Modeling and Analysis of Semiconductor Manufacturing Conferences 2010 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2010) 2010 IEEE Conference on Automation Science and Engineering (IEEE CASE 2010) Same or more conferences in 2011

TC meetings
IEEE/SEMI ASMC 2011 IEEE CASE, 2011

Conference special sessions for 2011

IEEE/SEMI ASMC 2011 special session on Cost and Productivity IEEE CASE 2011 session on Green Technology Automation (this is a new regular track developed by our TC) IEEE CASE 2011 special sessions in development IEEE ISSM 2011 special sessions in development

Emerging needs?

Publication
Special issue of IEEE T-ASE on Equipment and Operations Automation in the Semiconductor Industry to be published Jan 2011 Developing concept & proposal for special issue of IEEE T-ASE on Green Technology Automation to be submitted 2011

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IEEE RAS Technical Committee on Semiconductor Manufacturing Automation

http://xs3d.kaist.edu/TC-SMA

Future Development
Nominate new TC co-chair to replace retiring co-chair Identify and develop new areas in the TC (e.g., Green Technology Automation) Be a TC ambassador and develop our community (as always!)

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IEEE RAS Technical Committee on Semiconductor Manufacturing Automation

http://xs3d.kaist.edu/TC-SMA